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【英文篇名】 Functions of the Ozone Water in the Technigue of TFT Manufacture
【作者中文名】 孙凌;
【作者英文名】 SUN Ling 1.Changchun Institute of Optics; Fine Mechanics and Physics; Jilin Changchun 130021; China; 2.Graduate School of Chinese Academy of Sciences; Jilin Changchun 130031;
【作者单位】 中国科学院长春光学精密机械与物理研究所 吉林长春; 130021 中国科学院研究生部; 吉林长春; 130031;
【文献出处】 现代显示, Advanced Display, 编辑部邮箱 2007年 02期
期刊荣誉：ASPT来源刊 CJFD收录刊
【关键词】 薄膜晶体管制造; 臭氧; 臭氧水应用;
【英文关键词】 TFT manufacture; ozone; the functions of ozone water;
【摘要】 本文阐述了臭氧水在薄膜晶体管制造工艺中所起的清洗及成膜作用。在薄膜晶体管制造中,引入臭氧水工艺,增强了它的可控性,增加了欧姆接触,降低点欠陷数量,提高成品率。
【英文摘要】 This article elaborates the functions of the ozone water in the technique of the thin film transistor manufacture are not only cleaning but also the formation of oxided film. In the thin film transistor manufacture,the technique introducting ozone water is benificial to strengthen the technique's controllability,increase ohm contact,fall down the quantities of defects,and enhance the end product rate.
【DOI】 CNKI:ISSN:1006-6268.0.2007-02-011
